Lecture 1 - Introduction to Microscale Sensors or MEMS Lecture 2 - Scaling effect Lecture 3 - Some Simple Mechanics Lecture 4 - Basic Mechanics - Part 1 Lecture 5 - Basic Mechanics - Part 2 Lecture 6 - Basic Mechanics - Part 3 Lecture 7 - Electrostatics Lecture 8 - Electrostatic force Lecture 9 - Coupled electromechanics Lecture 10 - Stiction Lecture 11 - Si crystal structure Lecture 12 - Si etching Lecture 13 - KOH etching Lecture 14 - TMAH etching Lecture 15 - Deposition and Lithography Lecture 16 - Lithography Lecture 17 - Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing Lecture 18 - Pressure Sensor - II Lecture 19 - Pressure Sensor - III Lecture 20 - Accelerometer - I Lecture 21 - Accelerometer - II Lecture 22 - Assignment 1 Lecture 23 - Assignment 2